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手动高分辨率调节架实例
提供两种类型的千分尺,可进行粗调(10um)和精调(0.5um)。 |
| |
SMF |
WG |
SMF |
| X |
粗调±6.5mm 10μm/div
精调±0.3mm 0.5μm/div |
±6.5mm 10μm/div |
粗调±6.5mm 10μm/div
精调±0.3mm 0.5μm/div |
| Y |
±3.0mm 10μm/div |
| Z |
- |
| θx |
±3°
≈34"/div |
- |
±3° ≈34"/div |
| θy |
- |
| θz |
- |
- |
- |
|
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超精密定位器实例
手动粗调(10um),部进电机调节(0.1um/脉冲)。 |
| |
SMF |
WG |
SMF |
| X |
粗调±6.5mm 10μm/pulse
精调±0.3mm 0.1μm/pulse |
±6.5mm 10μm/pulse |
粗调±6.5mm 10μm/pulse
精调±0.3mm 0.1μm/pulse |
| Y |
±3.0mm 10μm/pulse |
| Z |
±6.5mm 10μm/pulse |
| θx |
±3° ≈34"/div |
- |
±3° ≈34"/div |
| θy |
- |
| θz |
- |
- |
- |
|
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电动调节架(XYZ)实例 机械驱动系统采用精密滚珠丝杠。自动调节可达到
0.05μm/步。
通过自动调节控制器进行操作(可选)。 |
| |
SMF |
WG |
SMF |
| X |
±10mm 0.05μm/pulse |
±6.5mm 10μm/pulse |
±10mm 0.05μm/pulse |
| Y |
±3.0mm 10μm/pulse |
| Z |
- |
| θx |
±3° ≈31"/div |
- |
±3° ≈31"/div |
| θy |
±3° ≈27"/div |
±7° ≈1'14"/div |
±3° ≈27"/div |
| θz |
- |
- |
- |
|
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FA-WG-FA
|
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电动调节架(XYZθz)调节实例
机械驱动系统采用精密滚珠丝杠。 自动调节可达到 0.05μm/步。通过自动调节控制器进行操作(可选)。
|
| |
FA |
WG |
FA |
| X |
±10mm 0.05μm/pulse |
±6.5mm 10μm/pulse |
±10mm 0.05μm/pulse |
| Y |
±3.0mm 10μm/pulse |
| Z |
- |
| θx |
±3° 34"/div |
- |
±3° 34"/div |
| θy |
±3° ≈34"/div |
| θz |
±10° 0.0045°/pulse |
- |
±10° 0.0045°/pulse |
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